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Large Scale Mask Optimization Via Convolutional Fourier Neural Operator and Litho-Guided Self Training. (arXiv:2207.04056v1 [cs.LG]) http://arxiv.org/abs/2207.04056
Large Scale Mask Optimization Via Convolutional Fourier Neural Operator and Litho-Guided Self Training. (arXiv:2207.04056v1 [cs.LG]) http://arxiv.org/abs/2207.04056