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Design, Fabrication, Characterization and Reliability Study of CMOS-MEMS Lorentz-Force Magnetometers. (arXiv:2109.10980v1 [physics.ins-det]) http://arxiv.org/abs/2109.10980
Design, Fabrication, Characterization and Reliability Study of CMOS-MEMS Lorentz-Force Magnetometers. (arXiv:2109.10980v1 [physics.ins-det]) http://arxiv.org/abs/2109.10980