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A versatile and compact high-intensity electron beam for multi-kGy irradiation in nano or micro-electronic devices. (arXiv:2001.10034v1 [physics.app-ph]) http://arxiv.org/abs/2001.10034
A versatile and compact high-intensity electron beam for multi-kGy irradiation in nano or micro-electronic devices. (arXiv:2001.10034v1 [physics.app-ph]) http://arxiv.org/abs/2001.10034