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The Simulation, Fabrication Technology and Characteristic Research of Micro-Pressure Sensor with Isosceles Trapezoidal Beam-Membrane. (arXiv:2002.12484v1 [physics.app-ph]) http://arxiv.org/abs/2002.12484
The Simulation, Fabrication Technology and Characteristic Research of Micro-Pressure Sensor with Isosceles Trapezoidal Beam-Membrane. (arXiv:2002.12484v1 [physics.app-ph]) http://arxiv.org/abs/2002.12484