Introducing refellips: new free/open source software package for analysing #ellipsometry data for #thin #films. Based on refnx (neutron and X-ray reflection analysis), refellips can read lots of commercial ellipsometry data formats and allows corefining ellipsometry, NR and XRR data.
Paper + source code:
authors.elsevier.com/sd/articl
doi.org/10.1016/j.softx.2022.1
github.com/refnx/refellips/

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