@monsoon0 found a larger one (and probably the largest): Zadeh's (1965) paper on fuzzy sets:
https://scholar.google.com/scholar?hl=en&as_sdt=0%2C3&q=fuzzy+sets&btnG=
@monsoon0 turns out, it's probably Shannon's "A Mathematical Theory of Communication":
https://scholar.google.com/scholar?hl=en&as_sdt=0%2C3&q=theory+of+communication+Shannon&btnG=
@sojournTime @monsoon0 149000+!
@monsoon0 Nature's top 100 article:
https://www.nature.com/news/the-top-100-papers-1.16224